Standard reference materials : preparation and certification of SRM-2530, ellipsometric parameters ? and ? and derived thickness and refractive index of a silicon dioxide layer on silicon / / G. A. Candela, D. Chandler-Horowitz, D. B. Novotny, B. J. Belzer,M. C. Croarkin
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| Titolo: |
Standard reference materials : preparation and certification of SRM-2530, ellipsometric parameters ? and ? and derived thickness and refractive index of a silicon dioxide layer on silicon / / G. A. Candela, D. Chandler-Horowitz, D. B. Novotny, B. J. Belzer,M. C. Croarkin
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| Pubblicazione: | Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 1988 |
| Descrizione fisica: | 1 online resource |
| Altri autori: |
BelzerBenjamin Joseph
CandelaG. A (George A.)
Chandler-HorowitzDeane
CroarkinM. C
NovotnyD. B
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| Note generali: | 1988. |
| Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. | |
| Title from PDF title page. | |
| Nota di bibliografia: | Includes bibliographical references. |
| Altri titoli varianti: | Standard reference materials |
| Titolo autorizzato: | Standard reference materials |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910709560803321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |