01664aam 2200421I 450 991070956080332120151026040613.0GOVPUB-C13-03d8c9ca8b2095f50bd5737327be8d5c(CKB)5470000002479392(OCoLC)926748738(EXLCZ)99547000000247939220151026d1988 ua 0engrdacontentrdamediardacarrierStandard reference materials preparation and certification of SRM-2530, ellipsometric parameters ? and ? and derived thickness and refractive index of a silicon dioxide layer on silicon /G. A. Candela, D. Chandler-Horowitz, D. B. Novotny, B. J. Belzer,M. C. CroarkinGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1988.1 online resourceNIST special publication ;260-1091988.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Standard reference materials Belzer Benjamin Joseph1391513Candela G. A(George A.)1391514Chandler-Horowitz Deane1391515Croarkin M. C1391516Novotny D. B1391517National Institute of Standards and Technology (U.S.)NBSNBSGPOBOOK9910709560803321Standard reference materials3445361UNINA