LEADER 01664aam  2200421I  450 
001 9910709560803321
005 20151026040613.0
024 8 $aGOVPUB-C13-03d8c9ca8b2095f50bd5737327be8d5c
035   $a(CKB)5470000002479392
035   $a(OCoLC)926748738
035   $a(EXLCZ)995470000002479392
100   $a20151026d1988      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 00$aStandard reference materials $epreparation and certification of SRM-2530, ellipsometric parameters ? and ? and derived thickness and refractive index of a silicon dioxide layer on silicon /$fG. A. Candela, D. Chandler-Horowitz, D. B. Novotny, B. J. Belzer,M. C. Croarkin
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1988.
215   $a1 online resource
225 1 $aNIST special publication ;$v260-109
300   $a1988.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aStandard reference materials 
701   $aBelzer$b Benjamin Joseph$01391513
701   $aCandela$b G. A$g(George A.)$01391514
701   $aChandler-Horowitz$b Deane$01391515
701   $aCroarkin$b M. C$01391516
701   $aNovotny$b D. B$01391517
712 02$aNational Institute of Standards and Technology (U.S.)
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910709560803321
996   $aStandard reference materials$93445361
997   $aUNINA