Documentation for Reference Material (RM) 8820 : a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy / / Michael T. Postek, Andras E. Vladar, Bin Mang, Benjamin Bunday

• Pubblicazione: Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 2014
• Descrizione fisica: 1 online resource (315 pages) : illustrations (black and white)
• Soggetto topico: Metrology; Microscopy
• Altri autori: CrowleyChris J JohnsonAaron N PopeJodie G WrightJohn D
• Note generali: "January 2014."; Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.; Title from PDF title page (viewed February 6, 2014).
• Nota di bibliografia: Includes bibliographical references.
• Altri titoli varianti: Documentation for Reference Material
• Titolo autorizzato: Documentation for Reference Material (RM) 8820
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Lingua di pubblicazione: Inglese
• Record Nr.: 9910709583403321
• Lo trovi qui: Univ. Federico II