01820aam 2200457I 450 991070958340332120140212045519.0GOVPUB-C13-1cb45ab96fd9b91901073fab856dd6db(CKB)5470000002479164(OCoLC)870343714(EXLCZ)99547000000247916420140212d2014 ua 0engrdacontentrdamediardacarrierDocumentation for Reference Material (RM) 8820 a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy /Michael T. Postek, Andras E. Vladar, Bin Mang, Benjamin BundayGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,2014.1 online resource (315 pages) illustrations (black and white)NIST special publication ;1170"January 2014."Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page (viewed February 6, 2014).Includes bibliographical references.Documentation for Reference Material MetrologyMicroscopyMetrology.Microscopy.Crowley Chris J1412242Johnson Aaron N1394748Pope Jodie G1390836Wright John D174495Physical Measurement Laboratory (National Institute of Standards and Technology (U.S.))NBSNBSGPOBOOK9910709583403321Documentation for Reference Material (RM) 88203505212UNINA