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005 20140212045519.0
024 8 $aGOVPUB-C13-1cb45ab96fd9b91901073fab856dd6db
035   $a(CKB)5470000002479164
035   $a(OCoLC)870343714
035   $a(EXLCZ)995470000002479164
100   $a20140212d2014      ua             0
101 0 $aeng
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 00$aDocumentation for Reference Material (RM) 8820 $ea versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy /$fMichael T. Postek, Andras E. Vladar, Bin Mang, Benjamin Bunday
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d2014.
215   $a1 online resource (315 pages) $cillustrations (black and white)
225 1 $aNIST special publication ;$v1170
300   $a"January 2014."
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page (viewed February 6, 2014).
320   $aIncludes bibliographical references.
517   $aDocumentation for Reference Material 
606   $aMetrology
606   $aMicroscopy
615  0$aMetrology.
615  0$aMicroscopy.
701   $aCrowley$b Chris J$01412242
701   $aJohnson$b Aaron N$01394748
701   $aPope$b Jodie G$01390836
701   $aWright$b John D$0174495
712 02$aPhysical Measurement Laboratory (National Institute of Standards and Technology (U.S.))
801  0$bNBS
801  1$bNBS
801  2$bGPO
906   $aBOOK
912   $a9910709583403321
996   $aDocumentation for Reference Material (RM) 8820$93505212
997   $aUNINA