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Record Nr. |
UNINA9910709583403321 |
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Titolo |
Documentation for Reference Material (RM) 8820 : a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy / / Michael T. Postek, Andras E. Vladar, Bin Mang, Benjamin Bunday |
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Pubbl/distr/stampa |
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Gaithersburg, MD : , : U.S. Dept. of Commerce, National Institute of Standards and Technology, , 2014 |
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Descrizione fisica |
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1 online resource (315 pages) : illustrations (black and white) |
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Collana |
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NIST special publication ; ; 1170 |
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Altri autori (Persone) |
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CrowleyChris J |
JohnsonAaron N |
PopeJodie G |
WrightJohn D |
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Soggetti |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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"January 2014." |
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. |
Title from PDF title page (viewed February 6, 2014). |
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Nota di bibliografia |
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Includes bibliographical references. |
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