ISSM : 2018 International Symposium on Semiconductor Manufacturing : proceedings of technical papers : December 10-11, 2018, KFC Hall, Tokyo, Japan / / Institute of Electrical and Electronics Engineers
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| Titolo: |
ISSM : 2018 International Symposium on Semiconductor Manufacturing : proceedings of technical papers : December 10-11, 2018, KFC Hall, Tokyo, Japan / / Institute of Electrical and Electronics Engineers
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| Pubblicazione: | Piscataway, New Jersey : , : Institute of Electrical and Electronics Engineers, , 2018 |
| Descrizione fisica: | 1 online resource (159 pages) |
| Disciplina: | 670.42 |
| Soggetto topico: | Production engineering - Data processing |
| Computer integrated manufacturing systems | |
| Engineering design | |
| Semiconductors - Design and construction | |
| Manufacturing processes - Data processing | |
| Note generali: | Includes index. |
| Titolo autorizzato: | ISSM |
| ISBN: | 1-5386-6268-X |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 996577950303316 |
| Lo trovi qui: | Univ. di Salerno |
| Opac: | Controlla la disponibilità qui |