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Record Nr. |
UNISA996577950303316 |
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Titolo |
ISSM : 2018 International Symposium on Semiconductor Manufacturing : proceedings of technical papers : December 10-11, 2018, KFC Hall, Tokyo, Japan / / Institute of Electrical and Electronics Engineers |
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Pubbl/distr/stampa |
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Piscataway, New Jersey : , : Institute of Electrical and Electronics Engineers, , 2018 |
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ISBN |
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Descrizione fisica |
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1 online resource (159 pages) |
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Disciplina |
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Soggetti |
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Production engineering - Data processing |
Computer integrated manufacturing systems |
Engineering design |
Semiconductors - Design and construction |
Manufacturing processes - Data processing |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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