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035   $a(CKB)4100000007744660
035   $a(WaSeSS)IndRDA00122809
035   $a(EXLCZ)994100000007744660
100   $a20200513d2018      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aISSM $e2018 International Symposium on Semiconductor Manufacturing : proceedings of technical papers : December 10-11, 2018, KFC Hall, Tokyo, Japan /$fInstitute of Electrical and Electronics Engineers
210  1$aPiscataway, New Jersey :$cInstitute of Electrical and Electronics Engineers,$d2018.
215   $a1 online resource (159 pages)
300   $aIncludes index.
311   $a1-5386-6269-8 
606   $aProduction engineering$xData processing$vCongresses
606   $aComputer integrated manufacturing systems$vCongresses
606   $aEngineering design$vCongresses
606   $aSemiconductors$xDesign and construction$vCongresses
606   $aManufacturing processes$xData processing$vCongresses
615  0$aProduction engineering$xData processing
615  0$aComputer integrated manufacturing systems
615  0$aEngineering design
615  0$aSemiconductors$xDesign and construction
615  0$aManufacturing processes$xData processing
676   $a670.42
712 02$aInstitute of Electrical and Electronics Engineers,
801  0$bWaSeSS
801  1$bWaSeSS
906   $aPROCEEDING
912   $a996577950303316
996   $aISSM$92525267
997   $aUNISA