01682nam 2200445 450 99657795030331620230814231140.01-5386-6268-X(CKB)4100000007744660(WaSeSS)IndRDA00122809(EXLCZ)99410000000774466020200513d2018 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierISSM 2018 International Symposium on Semiconductor Manufacturing : proceedings of technical papers : December 10-11, 2018, KFC Hall, Tokyo, Japan /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2018.1 online resource (159 pages)Includes index.1-5386-6269-8 Production engineeringData processingCongressesComputer integrated manufacturing systemsCongressesEngineering designCongressesSemiconductorsDesign and constructionCongressesManufacturing processesData processingCongressesProduction engineeringData processingComputer integrated manufacturing systemsEngineering designSemiconductorsDesign and constructionManufacturing processesData processing670.42Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSPROCEEDING996577950303316ISSM2525267UNISA