Microprocesses and nanotechnology 2002 : digest of papers : 2002 International Microprocesses and Nanotechnology Conference : November 6-8, 2002, Tokyo, Japan
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| Titolo: |
Microprocesses and nanotechnology 2002 : digest of papers : 2002 International Microprocesses and Nanotechnology Conference : November 6-8, 2002, Tokyo, Japan
|
| Pubblicazione: | [Place of publication not identified], : Business Center for Academic Societies Japan, 2002 |
| Disciplina: | 621.39/5 |
| Soggetto topico: | Integrated circuits - Design and construction - Very large scale integration |
| Lithography | |
| Nanotechnology | |
| Microelectronics | |
| Electrical & Computer Engineering | |
| Engineering & Applied Sciences | |
| Electrical Engineering | |
| Persona (resp. second.): | OkazakiShinji |
| Note generali: | Bibliographic Level Mode of Issuance: Monograph |
| Titolo autorizzato: | Microprocesses and nanotechnology 2002 : digest of papers : 2002 International Microprocesses and Nanotechnology Conference : November 6-8, 2002, Tokyo, Japan |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910872558303321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |