02091oam 2200541zu 450 991087255830332120241212215354.0(CKB)1000000000022821(SSID)ssj0000395508(PQKBManifestationID)12119863(PQKBTitleCode)TC0000395508(PQKBWorkID)10451714(PQKB)10020539(EXLCZ)99100000000002282120160829d2002 uy engtxtccrMicroprocesses and nanotechnology 2002 : digest of papers : 2002 International Microprocesses and Nanotechnology Conference : November 6-8, 2002, Tokyo, Japan[Place of publication not identified]Business Center for Academic Societies Japan2002Bibliographic Level Mode of Issuance: Monograph9784891140311 4891140313 Integrated circuitsDesign and constructionVery large scale integrationCongressesLithographyCongressesNanotechnologyCongressesMicroelectronicsCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCIntegrated circuitsDesign and constructionVery large scale integrationLithographyNanotechnologyMicroelectronicsElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.39/5Okazaki ShinjiAmerican Vacuum SocietyIEEE Electron Devices SocietyInternational Microprocesses and Nanotechnology ConferencePQKBPROCEEDING9910872558303321Microprocesses and nanotechnology 2002 : digest of papers : 2002 International Microprocesses and Nanotechnology Conference : November 6-8, 2002, Tokyo, Japan2532716UNINA