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Record Nr. |
UNINA9910872558303321 |
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Titolo |
Microprocesses and nanotechnology 2002 : digest of papers : 2002 International Microprocesses and Nanotechnology Conference : November 6-8, 2002, Tokyo, Japan |
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Pubbl/distr/stampa |
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[Place of publication not identified], : Business Center for Academic Societies Japan, 2002 |
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Disciplina |
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Soggetti |
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Integrated circuits - Design and construction - Very large scale integration |
Lithography |
Nanotechnology |
Microelectronics |
Electrical & Computer Engineering |
Engineering & Applied Sciences |
Electrical Engineering |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Bibliographic Level Mode of Issuance: Monograph |
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