LEADER 02091oam  2200541zu 450 
001 9910872558303321
005 20241212215354.0
035   $a(CKB)1000000000022821
035   $a(SSID)ssj0000395508
035   $a(PQKBManifestationID)12119863
035   $a(PQKBTitleCode)TC0000395508
035   $a(PQKBWorkID)10451714
035   $a(PQKB)10020539
035   $a(EXLCZ)991000000000022821
100   $a20160829d2002      uy 
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$aMicroprocesses and nanotechnology 2002 : digest of papers : 2002 International Microprocesses and Nanotechnology Conference : November 6-8, 2002, Tokyo, Japan
210 31$a[Place of publication not identified]$cBusiness Center for Academic Societies Japan$d2002
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9784891140311 
311 08$a4891140313 
606   $aIntegrated circuits$xDesign and construction$xVery large scale integration$vCongresses
606   $aLithography$vCongresses
606   $aNanotechnology$vCongresses
606   $aMicroelectronics$vCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aIntegrated circuits$xDesign and construction$xVery large scale integration
615  0$aLithography
615  0$aNanotechnology
615  0$aMicroelectronics
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
676   $a621.39/5
702   $aOkazaki$b Shinji
712 02$aAmerican Vacuum Society
712 02$aIEEE Electron Devices Society
712 12$aInternational Microprocesses and Nanotechnology Conference
801  0$bPQKB
906   $aPROCEEDING
912   $a9910872558303321
996   $aMicroprocesses and nanotechnology 2002 : digest of papers : 2002 International Microprocesses and Nanotechnology Conference : November 6-8, 2002, Tokyo, Japan$92532716
997   $aUNINA