2001 6th International Symposium on Plasma- and Process-Induced Damage : May 13-15, 2001, Monterey, California, USA
(Visualizza in formato marc)
(Visualizza in BIBFRAME)
| Titolo: |
2001 6th International Symposium on Plasma- and Process-Induced Damage : May 13-15, 2001, Monterey, California, USA
|
| Pubblicazione: | [Place of publication not identified], : Northern California Chapter of the American Vacuum Society, 2001 |
| Disciplina: | 621.3815/2 |
| Soggetto topico: | Semiconductor wafers - Effect of radiation on |
| Semiconductors - Defects | |
| Plasma radiation | |
| Semiconductors | |
| Electrical & Computer Engineering | |
| Engineering & Applied Sciences | |
| Electrical Engineering | |
| Persona (resp. second.): | EngelhardtManfred |
| GabrielCalvin T | |
| HookTerence | |
| Note generali: | Bibliographic Level Mode of Issuance: Monograph |
| Titolo autorizzato: | 2001 6th International Symposium on Plasma- and Process-Induced Damage : May 13-15, 2001, Monterey, California, USA |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910872958903321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |