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100   $a20160829d2001      uy 
101 0 $aeng
181   $ctxt
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183   $acr
200 10$a2001 6th International Symposium on Plasma- and Process-Induced Damage : May 13-15, 2001, Monterey, California, USA
210 31$a[Place of publication not identified]$cNorthern California Chapter of the American Vacuum Society$d2001
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9780965157759 
311 08$a096515775X 
606   $aSemiconductor wafers$xEffect of radiation on$vCongresses
606   $aSemiconductors$xDefects$vCongresses
606   $aPlasma radiation$vCongresses
606   $aSemiconductors$vCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aSemiconductor wafers$xEffect of radiation on
615  0$aSemiconductors$xDefects
615  0$aPlasma radiation
615  0$aSemiconductors
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
676   $a621.3815/2
702   $aEngelhardt$b Manfred
702   $aGabriel$b Calvin T
702   $aHook$b Terence
712 02$aIEEE Electron Devices Society
712 02$aAmerican Vacuum Society
712 12$aInternational Symposium on Plasma Process-Induced Damage
801  0$bPQKB
906   $aPROCEEDING
912   $a9910872958903321
996   $a2001 6th International Symposium on Plasma- and Process-Induced Damage : May 13-15, 2001, Monterey, California, USA$92531197
997   $aUNINA