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Nanoscale Self-Assembly: Nanopatterning and Metrology



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Autore: Ferrarese Lupi Federico Visualizza persona
Titolo: Nanoscale Self-Assembly: Nanopatterning and Metrology Visualizza cluster
Pubblicazione: Basel, Switzerland, : MDPI - Multidisciplinary Digital Publishing Institute, 2021
Descrizione fisica: 1 online resource (124 p.)
Soggetto topico: Technology: general issues
Soggetto non controllato: (S)TEM
3D printing
analytical centrifugation
analytical ultracentrifugation
arbitrary distribution
block copolymer
block copolymer self-assembly
block copolymers
block copolymers (BCPs)
chemo-epitaxy
classification of nanoparticles
colloidal clusters
colloidal molecules
colloidal nanospheres
conjugated polymers
density gradient centrifugation
deposition surface
differential centrifugal sedimentation
direct laser-writing
directed self-assembly
directed self-assembly (DSA)
disk centrifuge
large scale
line edge roughness (LER)
line edge roughness LER
line width roughness (LWR)
line/space patterning
multimaterials
nano-resolution
nanoparticles
nanospheres lithography
nanostructure metrology
photoluminescence quenching
polyfullerenes
polymer interface
polystyrene-block-polymethylmethacrylate (PS-b-PMMA)
processing by convective self-assembly
rapidity
sedimentation
self-assembly
separation
sequential infiltration synthesis
STEM-EELS of PS and PMMA
tannic acid
thin films and microstructure
Persona (resp. second.): Ferrarese LupiFederico
Sommario/riassunto: The self-assembly process underlies a plethora of natural phenomena from the macro to the nano scale. Often, technological development has found great inspiration in the natural world, as evidenced by numerous fabrication techniques based on self-assembly (SA). One striking example is given by epitaxial growths, in which atoms represent the building blocks. In lithography, the use of self-assembling materials is considered an extremely promising patterning option to overcome the size scale limitations imposed by the conventional photolithographic methods. To this purpose, in the last two decades several supramolecular self-assembling materials have been investigated and successfully applied to create patterns at a nanometric scale. Although considerable progress has been made so far in the control of self-assembly processes applied to nanolithography, a number of unresolved problems related to the reproducibility and metrology of the self-assembled features are still open. Addressing these issues is mandatory in order to allow the widespread diffusion of SA materials for applications such as microelectronics, photonics, or biology. In this context, the aim of the present Special Issue is to gather original research papers and comprehensive reviews covering various aspects of the self-assembly processes applied to nanopatterning. Topics include the development of novel SA methods, the realization of nanometric structures and devices, and the improvement of their long-range order. Moreover, metrology issues related to the nanoscale characterization of self-assembled structures are addressed.
Altri titoli varianti: Nanoscale Self-Assembly
Titolo autorizzato: Nanoscale Self-Assembly: Nanopatterning and Metrology  Visualizza cluster
Formato: Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione: Inglese
Record Nr.: 9910557487403321
Lo trovi qui: Univ. Federico II
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