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Optical MEMS



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Autore: Zamkotsian Frederic Visualizza persona
Titolo: Optical MEMS Visualizza cluster
Pubblicazione: MDPI - Multidisciplinary Digital Publishing Institute, 2019
Descrizione fisica: 1 electronic resource (172 p.)
Soggetto non controllato: stray light
input shaping
wavefront sensing
signal-to-noise ratio (SNR)
LC micro-lenses controlled electrically
infrared
intraoperative microscope
MEMS mirror
MLSSP
ocular aberrations
MEMS scanning micromirror
electrothermal actuation
electrothermal bimorph
open-loop control
wavelength dependent loss (WDL)
NIR fluorescence
infrared Fabry-Perot (FP) filtering
two-photon
resonant MEMS scanner
residual oscillation
3D measurement
parametric resonance
digital micromirror device
quality map
metalens
flame retardant 4 (FR4)
angle sensor
optical switch
metasurface
vibration noise
optical coherence tomography
spectrometer
reliability
quasistatic actuation
Huygens' metalens
confocal
large reflection variations
electrostatic
dual-mode liquid-crystal (LC) device
field of view (FOV)
scanning micromirror
fluorescence confocal
variable optical attenuator (VOA)
micro-electro-mechanical systems (MEMS)
microscanner
laser stripe width
polarization dependent loss (PDL)
fringe projection
2D Lissajous
usable scan range
laser stripe scanning
bio-optical imaging
MEMS scanning mirror
digital micromirror device (DMD)
Cu/W bimorph
echelle grating
achromatic
DMD chip
tunable fiber laser
programmable spectral filter
higher-order modes
electromagnetic actuator
Persona (resp. second.): XieHuikai
Sommario/riassunto: Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense.
Titolo autorizzato: Optical MEMS  Visualizza cluster
ISBN: 3-03921-304-0
Formato: Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione: Inglese
Record Nr.: 9910367569103321
Lo trovi qui: Univ. Federico II
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