04951nam 2201045z- 450 991036756910332120231214133538.03-03921-304-0(CKB)4100000010106055(oapen)https://directory.doabooks.org/handle/20.500.12854/55304(EXLCZ)99410000001010605520202102d2019 |y 0engurmn|---annantxtrdacontentcrdamediacrrdacarrierOptical MEMSMDPI - Multidisciplinary Digital Publishing Institute20191 electronic resource (172 p.)3-03921-303-2 Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense.stray lightinput shapingwavefront sensingsignal-to-noise ratio (SNR)LC micro-lenses controlled electricallyinfraredintraoperative microscopeMEMS mirrorMLSSPocular aberrationsMEMS scanning micromirrorelectrothermal actuationelectrothermal bimorphopen-loop controlwavelength dependent loss (WDL)NIR fluorescenceinfrared Fabry-Perot (FP) filteringtwo-photonresonant MEMS scannerresidual oscillation3D measurementparametric resonancedigital micromirror devicequality mapmetalensflame retardant 4 (FR4)angle sensoroptical switchmetasurfacevibration noiseoptical coherence tomographyspectrometerreliabilityquasistatic actuationHuygens' metalensconfocallarge reflection variationselectrostaticdual-mode liquid-crystal (LC) devicefield of view (FOV)scanning micromirrorfluorescence confocalvariable optical attenuator (VOA)micro-electro-mechanical systems (MEMS)microscannerlaser stripe widthpolarization dependent loss (PDL)fringe projection2D Lissajoususable scan rangelaser stripe scanningbio-optical imagingMEMS scanning mirrordigital micromirror device (DMD)Cu/W bimorphechelle gratingachromaticDMD chiptunable fiber laserprogrammable spectral filterhigher-order modeselectromagnetic actuatorZamkotsian Fredericauth1331591Xie HuikaiauthBOOK9910367569103321Optical MEMS3040471UNINA