LEADER 05405nam 22011773a 450 001 9910367569103321 005 20250203235436.0 010 $a9783039213047 010 $a3039213040 024 8 $a10.3390/books978-3-03921-304-7 035 $a(CKB)4100000010106055 035 $a(oapen)https://directory.doabooks.org/handle/20.500.12854/55304 035 $a(ScCtBLL)18a3b5b4-1c5d-4612-b9e7-9e8d302993ce 035 $a(OCoLC)1163844493 035 $a(oapen)doab55304 035 $a(EXLCZ)994100000010106055 100 $a20250203i20192019 uu 101 0 $aeng 135 $aurmn|---annan 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 00$aOptical MEMS$fFrederic Zamkotsian, Huikai Xie 210 $cMDPI - Multidisciplinary Digital Publishing Institute$d2019 210 1$aBasel, Switzerland :$cMDPI,$d2019. 215 $a1 electronic resource (172 p.) 311 08$a9783039213030 311 08$a3039213032 330 $aOptical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments' digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal-silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense. 606 $aHistory of engineering and technology$2bicssc 610 $astray light 610 $ainput shaping 610 $awavefront sensing 610 $asignal-to-noise ratio (SNR) 610 $aLC micro-lenses controlled electrically 610 $ainfrared 610 $aintraoperative microscope 610 $aMEMS mirror 610 $aMLSSP 610 $aocular aberrations 610 $aMEMS scanning micromirror 610 $aelectrothermal actuation 610 $aelectrothermal bimorph 610 $aopen-loop control 610 $awavelength dependent loss (WDL) 610 $aNIR fluorescence 610 $ainfrared Fabry-Perot (FP) filtering 610 $atwo-photon 610 $aresonant MEMS scanner 610 $aresidual oscillation 610 $a3D measurement 610 $aparametric resonance 610 $adigital micromirror device 610 $aquality map 610 $ametalens 610 $aflame retardant 4 (FR4) 610 $aangle sensor 610 $aoptical switch 610 $ametasurface 610 $avibration noise 610 $aoptical coherence tomography 610 $aspectrometer 610 $areliability 610 $aquasistatic actuation 610 $aHuygens' metalens 610 $aconfocal 610 $alarge reflection variations 610 $aelectrostatic 610 $adual-mode liquid-crystal (LC) device 610 $afield of view (FOV) 610 $ascanning micromirror 610 $afluorescence confocal 610 $avariable optical attenuator (VOA) 610 $amicro-electro-mechanical systems (MEMS) 610 $amicroscanner 610 $alaser stripe width 610 $apolarization dependent loss (PDL) 610 $afringe projection 610 $a2D Lissajous 610 $ausable scan range 610 $alaser stripe scanning 610 $abio-optical imaging 610 $aMEMS scanning mirror 610 $adigital micromirror device (DMD) 610 $aCu/W bimorph 610 $aechelle grating 610 $aachromatic 610 $aDMD chip 610 $atunable fiber laser 610 $aprogrammable spectral filter 610 $ahigher-order modes 610 $aelectromagnetic actuator 615 7$aHistory of engineering and technology 700 $aZamkotsian$b Frederic$01331591 702 $aXie$b Huikai 801 0$bScCtBLL 801 1$bScCtBLL 906 $aBOOK 912 $a9910367569103321 996 $aOptical MEMS$93040471 997 $aUNINA