Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis

• Autore: Kopf Marlene
• Pubblicazione: Karlsruhe, : KIT Scientific Publishing, 2022
• Descrizione fisica: 1 electronic resource (220 p.)
• Soggetto topico: Mechanical engineering & materials
• Soggetto non controllato: MEMS-Sensor; Drehratensensor; Inertialsensor; Dämpfung; Q-Faktor; MEMS sensor; gyroscope; inertial sensor; damping atmosphere; Q factor
• Sommario/riassunto: Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.
• Titolo autorizzato: Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
• ISBN: 1000136062
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Lingua di pubblicazione: Tedesco
• Record Nr.: 9910557840503321
• Lo trovi qui: Univ. Federico II