LEADER 01936nam  2200445z- 450 
001 9910557840503321
005 20231214141113.0
010   $a1000136062
035   $a(CKB)5580000000300704
035   $a(oapen)https://directory.doabooks.org/handle/20.500.12854/80561
035   $a(EXLCZ)995580000000300704
100   $a20202204d2022      |y             0
101 0 $ager
135   $aurmn|---annan
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aLangzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
210   $aKarlsruhe$cKIT Scientific Publishing$d2022
215   $a1 electronic resource (220 p.)
225 1 $aSchriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie
311   $a3-7315-1121-5 
330   $aDue to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.
606   $aMechanical engineering & materials$2bicssc
610   $aMEMS-Sensor
610   $aDrehratensensor
610   $aInertialsensor
610   $aDämpfung
610   $aQ-Faktor
610   $aMEMS sensor
610   $agyroscope
610   $ainertial sensor
610   $adamping atmosphere
610   $aQ factor
615  7$aMechanical engineering & materials
700   $aKopf$b Marlene$4auth$01297545
906   $aBOOK
912   $a9910557840503321
996   $aLangzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis$93024523
997   $aUNINA