01936nam 2200445z- 450 991055784050332120231214141113.01000136062(CKB)5580000000300704(oapen)https://directory.doabooks.org/handle/20.500.12854/80561(EXLCZ)99558000000030070420202204d2022 |y 0gerurmn|---annantxtrdacontentcrdamediacrrdacarrierLangzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf SiliziumbasisKarlsruheKIT Scientific Publishing20221 electronic resource (220 p.)Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie3-7315-1121-5 Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.Mechanical engineering & materialsbicsscMEMS-SensorDrehratensensorInertialsensorDämpfungQ-FaktorMEMS sensorgyroscopeinertial sensordamping atmosphereQ factorMechanical engineering & materialsKopf Marleneauth1297545BOOK9910557840503321Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis3024523UNINA