01956nam 2200457z- 450 9910557840503321202204051000136062(CKB)5580000000300704(oapen)https://directory.doabooks.org/handle/20.500.12854/80561(oapen)doab80561(EXLCZ)99558000000030070420202204d2022 |y 0gerurmn|---annantxtrdacontentcrdamediacrrdacarrierLangzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf SiliziumbasisKarlsruheKIT Scientific Publishing20221 online resource (220 p.)Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie3-7315-1121-5 Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.Mechanical engineering & materialsbicsscDämpfungdamping atmosphereDrehratensensorgyroscopeinertial sensorInertialsensorMEMS sensorMEMS-SensorQ factorQ-FaktorMechanical engineering & materialsKopf Marleneauth1297545BOOK9910557840503321Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis3024523UNINA