Patterning of thick parylene films by oxygen plasma for application as exploding foil initiator flyer material [[electronic resource] /] / by Eugene Zakar and Michael D. Grapes
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| Autore: |
Zakar Eugene
|
| Titolo: |
Patterning of thick parylene films by oxygen plasma for application as exploding foil initiator flyer material [[electronic resource] /] / by Eugene Zakar and Michael D. Grapes
|
| Pubblicazione: | Adelphi, MD : , : Army Research Laboratory, [2009] |
| Descrizione fisica: | 1 online resource (vi, 16 pages) : illustrations (some color) |
| Soggetto topico: | Microelectromechanical systems |
| Thick films | |
| Polymers | |
| Altri autori: |
GrapesMichael D
|
| Note generali: | Title from title screen (viewed Mar. 12, 2010). |
| "September 2009." | |
| Nota di bibliografia: | Includes bibliographical references (page 14). |
| Titolo autorizzato: | Patterning of thick parylene films by oxygen plasma for application as exploding foil initiator flyer material |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910699367603321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |
Serie:
ARL-TR (Aberdeen Proving Ground, Md.) ; ; 4956.