01588oam 2200445Ia 450 991069936760332120230902161600.0(CKB)5470000002402238(OCoLC)495784026(EXLCZ)99547000000240223820091130d2009 ua 0engurmn|||||||||txtrdacontentcrdamediacrrdacarrierPatterning of thick parylene films by oxygen plasma for application as exploding foil initiator flyer material[electronic resource] /by Eugene Zakar and Michael D. GrapesAdelphi, MD :Army Research Laboratory, [2009]1 online resource (vi, 16 pages) illustrations (some color)ARL-TR ;4956Title from title screen (viewed Mar. 12, 2010)."September 2009."Includes bibliographical references (page 14).ARL-TR (Aberdeen Proving Ground, Md.) ;4956.Microelectromechanical systemsThick filmsPolymersMicroelectromechanical systems.Thick films.Polymers.Zakar Eugene1387268Grapes Michael D1411427U.S. Army Research Laboratory.DTICEDTICEGPOBOOK9910699367603321Patterning of thick parylene films by oxygen plasma for application as exploding foil initiator flyer material3502734UNINA