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035   $a(CKB)5470000002402238
035   $a(OCoLC)495784026
035   $a(EXLCZ)995470000002402238
100   $a20091130d2009      ua             0
101 0 $aeng
135   $aurmn|||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aPatterning of thick parylene films by oxygen plasma for application as exploding foil initiator flyer material$b[electronic resource] /$fby Eugene Zakar and Michael D. Grapes
210  1$aAdelphi, MD :$cArmy Research Laboratory, [2009]
215   $a1 online resource (vi, 16 pages) $cillustrations (some color)
225 1 $aARL-TR ;$v4956
300   $aTitle from title screen (viewed Mar. 12, 2010).
300   $a"September 2009."
320   $aIncludes bibliographical references (page 14).
410  0$aARL-TR (Aberdeen Proving Ground, Md.) ;$v4956.
606   $aMicroelectromechanical systems
606   $aThick films
606   $aPolymers
615  0$aMicroelectromechanical systems.
615  0$aThick films.
615  0$aPolymers.
700   $aZakar$b Eugene$01387268
701   $aGrapes$b Michael D$01411427
712 02$aU.S. Army Research Laboratory.
801  0$bDTICE
801  1$bDTICE
801  2$bGPO
906   $aBOOK
912   $a9910699367603321
996   $aPatterning of thick parylene films by oxygen plasma for application as exploding foil initiator flyer material$93502734
997   $aUNINA