Nanolithography and patterning techniques in microelectonics / / edited by David G. Bucknall
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| Titolo: |
Nanolithography and patterning techniques in microelectonics / / edited by David G. Bucknall
|
| Pubblicazione: | Cambridge, : Woodhead Pub. |
| Boca Raton, FL, : CRC Press, c2005 | |
| Descrizione fisica: | 1 online resource (424 p.) |
| Disciplina: | 621.3815/31 |
| 686.2315 | |
| Soggetto topico: | Microlithography |
| Nanotechnology | |
| Altri autori: |
BucknallDavid G
|
| Note generali: | Description based upon print version of record. |
| Nota di bibliografia: | Includes bibliographical references and index. |
| Nota di contenuto: | Prelium; Contents; Block copolymer nanolithography; Surface-induced structure formation of polymer blends; Rapid prototyping of functional microfabricated devices by soft lithography; Chemomechanical surface modification of materials for patterning; Patterning of polymer thin films; Ion beam patterning; Nanofabrication by shadow deposition through nanostencils; Photolithography beyond the diffraction limit; Ink-jet printing as a tool in manufacturing and instrumentation; Actuators and patterns for microfluidic control; Manipulation of biomolecules and reactions |
| Nonlithographic patterning: application of inkjet printing in organic-based devicesHigh-resolution, printing techniques for plastic electronics; Index | |
| Sommario/riassunto: | Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the site selective immobilisation of molecules, to form functional, hierarchic |
| Titolo autorizzato: | Nanolithography and patterning techniques in microelectonics |
| ISBN: | 1-280-56833-X |
| 9786610568338 | |
| 1-61583-186-X | |
| 1-84569-090-7 | |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9911006529103321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |
Serie:
Woodhead Publishing in materials.