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005 20200520144314.0
010   $a1-280-56833-X
010   $a9786610568338
010   $a1-61583-186-X
010   $a1-84569-090-7
035   $a(CKB)1000000000247119
035   $a(EBL)269388
035   $a(OCoLC)439707708
035   $a(SSID)ssj0000207886
035   $a(PQKBManifestationID)12056941
035   $a(PQKBTitleCode)TC0000207886
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035   $a(MiAaPQ)EBC1639701
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100   $a20051220d2005      uy         0
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 00$aNanolithography and patterning techniques in microelectonics /$fedited by David G. Bucknall
210   $aCambridge $cWoodhead Pub. ;$aBoca Raton, FL $cCRC Press$dc2005
215   $a1 online resource (424 p.)
225 1 $aWoodhead Publishing in materials
300   $aDescription based upon print version of record.
311   $a1-85573-931-3 
320   $aIncludes bibliographical references and index.
327   $aPrelium; Contents; Block copolymer nanolithography; Surface-induced structure formation of  polymer blends; Rapid prototyping of functional  microfabricated devices by  soft lithography; Chemomechanical surface modification of materials for patterning; Patterning of polymer thin films; Ion beam patterning; Nanofabrication by shadow deposition  through nanostencils; Photolithography beyond the diffraction limit; Ink-jet printing as a tool in manufacturing  and instrumentation; Actuators and patterns for  microfluidic control; Manipulation of biomolecules and reactions
327   $aNonlithographic patterning: application of  inkjet printing in organic-based devicesHigh-resolution, printing techniques for  plastic electronics; Index
330   $aCurrently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the site selective immobilisation of molecules, to form functional, hierarchic
410  0$aWoodhead Publishing in materials.
606   $aMicrolithography
606   $aNanotechnology
615  0$aMicrolithography.
615  0$aNanotechnology.
676   $a621.3815/31
676   $a686.2315
701   $aBucknall$b David G$01822669
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9911006529103321
996   $aNanolithography and patterning techniques in microelectonics$94388999
997   $aUNINA