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[null,"1.","Record Nr.",null,"UNINA9911006529103321"]
[null,null,"Titolo",null,"Nanolithography and patterning techniques in microelectonics / / edited by David G. Bucknall"]
[null,null,"Pubbl/distr/stampa",null,"Cambridge, : Woodhead Pub."]
[{"$nulls":4},"Boca Raton, FL, : CRC Press, c2005"]
[null,null,"ISBN",null,"1-280-56833-X"]
[{"$nulls":4},"9786610568338"]
[{"$nulls":4},"1-61583-186-X"]
[{"$nulls":4},"1-84569-090-7"]
[null,null,"Descrizione fisica",null,"1 online resource (424 p.)"]
[null,null,"Collana",null,"Woodhead Publishing in materials"]
[null,null,"Disciplina",null,"621.3815/31"]
[{"$nulls":4},"686.2315"]
[null,null,"Soggetti",null,"Microlithography"]
[{"$nulls":4},"Nanotechnology"]
[null,null,"Lingua di pubblicazione",null,"Inglese"]
[null,null,"Formato",null,"Materiale a stampa"]
[null,null,null,"Livello bibliografico","Monografia"]
[null,null,null,"Note generali","Description based upon print version of record."]
[null,null,null,"Nota di bibliografia","Includes bibliographical references and index."]
[null,null,"Nota di contenuto",null,"Prelium; Contents; Block copolymer nanolithography; Surface-induced structure formation of  polymer blends; Rapid prototyping of functional  microfabricated devices by  soft lithography; Chemomechanical surface modification of materials for patterning; Patterning of polymer thin films; Ion beam patterning; Nanofabrication by shadow deposition  through nanostencils; Photolithography beyond the diffraction limit; Ink-jet printing as a tool in manufacturing  and instrumentation; Actuators and patterns for  microfluidic control; Manipulation of biomolecules and reactions"]
[{"$nulls":4},"Nonlithographic patterning: application of  inkjet printing in organic-based devicesHigh-resolution, printing techniques for  plastic electronics; Index"]
[null,null,null,"Sommario/riassunto","Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the "]
[{"$nulls":4},"site selective immobilisation of molecules, to form functional, hierarchic"]