From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou
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| Autore: |
Madou Marc J.
|
| Titolo: |
From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou
|
| Pubblicazione: | Boca Raton, FL : , : CRC Press, an imprint of Taylor and Francis, , 2011 |
| Edizione: | Third edition. |
| Descrizione fisica: | 1 online resource (642 p.) |
| Disciplina: | 620.5 |
| Soggetto topico: | Microelectromechanical systems |
| Nanoelectromechanical systems | |
| Microfluidics | |
| Solid state physics | |
| Note generali: | Description based upon print version of record. |
| Nota di bibliografia: | Includes bibliographical references at the end of each chapters. |
| Nota di contenuto: | Front Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared; Chapter 2: Nature as an Engineering Guide: Biomimetics; Chapter 3: Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared; Chapter 4: Packaging, Assembly, and Self-Assembly; Chapter 5: Selected Materials and Processes for MEMS and NEMS; Chapter 6: Metrology and MEMS/NEMS Modeling; Chapter 7: Scaling Laws; Chapter 8: Actuators; Chapter 9: Power and Brains in Miniature Devices |
| Chapter 10: MEMS and NEMS ApplicationsBack Cover | |
| Sommario/riassunto: | From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms. |
| Titolo autorizzato: | From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications |
| ISBN: | 0-429-10921-0 |
| 1-4200-5518-6 | |
| 1-4398-9524-4 | |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910829016703321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |