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024 7 $a10.1201/9781439895245
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035   $a(EBL)1446478
035   $a(MiAaPQ)EBC1446478
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100   $a20180706d2011      uy             0
101 0 $aeng
135   $aur|n|---|||||
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aFrom MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications /$fby Marc J. Madou
205   $aThird edition.
210  1$aBoca Raton, FL :$cCRC Press, an imprint of Taylor and Francis,$d2011.
215   $a1 online resource (642 p.)
300   $aDescription based upon print version of record.
311   $a1-4200-5516-X 
320   $aIncludes bibliographical references at the end of each chapters.
327   $aFront Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared; Chapter 2: Nature as an Engineering Guide: Biomimetics; Chapter 3: Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared; Chapter 4: Packaging, Assembly, and Self-Assembly; Chapter 5: Selected Materials and Processes for MEMS and NEMS; Chapter 6: Metrology and MEMS/NEMS Modeling; Chapter 7: Scaling Laws; Chapter 8: Actuators; Chapter 9: Power and Brains in Miniature Devices
327   $aChapter 10: MEMS and NEMS ApplicationsBack Cover
330 3 $aFrom MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms.
606   $aMicroelectromechanical systems
606   $aNanoelectromechanical systems
606   $aMicrofluidics
606   $aSolid state physics
615  0$aMicroelectromechanical systems.
615  0$aNanoelectromechanical systems.
615  0$aMicrofluidics.
615  0$aSolid state physics.
676   $a620.5
700   $aMadou$b Marc J.$01637453
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910829016703321
996   $aFrom MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications$93979290
997   $aUNINA