03083oam 2200589I 450 991082901670332120221227120943.00-429-10921-01-4200-5518-61-4398-9524-410.1201/9781439895245(CKB)3710000000391173(EBL)1446478(MiAaPQ)EBC1446478(Au-PeEL)EBL1446478(CaPaEBR)ebr11166029(OCoLC)908077533(OCoLC)958799057(EXLCZ)99371000000039117320180706d2011 uy 0engur|n|---|||||rdacontentrdamediardacarrierFrom MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications /by Marc J. MadouThird edition.Boca Raton, FL :CRC Press, an imprint of Taylor and Francis,2011.1 online resource (642 p.)Description based upon print version of record.1-4200-5516-X Includes bibliographical references at the end of each chapters.Front Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared; Chapter 2: Nature as an Engineering Guide: Biomimetics; Chapter 3: Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared; Chapter 4: Packaging, Assembly, and Self-Assembly; Chapter 5: Selected Materials and Processes for MEMS and NEMS; Chapter 6: Metrology and MEMS/NEMS Modeling; Chapter 7: Scaling Laws; Chapter 8: Actuators; Chapter 9: Power and Brains in Miniature DevicesChapter 10: MEMS and NEMS ApplicationsBack CoverFrom MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms.Microelectromechanical systemsNanoelectromechanical systemsMicrofluidicsSolid state physicsMicroelectromechanical systems.Nanoelectromechanical systems.Microfluidics.Solid state physics.620.5Madou Marc J.1637453MiAaPQMiAaPQMiAaPQBOOK9910829016703321From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications3979290UNINA