Plasma processing of materials [[electronic resource] ] : scientific opportunities and technological challenges / / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council
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| Titolo: |
Plasma processing of materials [[electronic resource] ] : scientific opportunities and technological challenges / / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council
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| Pubblicazione: | Washington, D.C., : National Academy Press, 1991 |
| Descrizione fisica: | 1 online resource (87 p.) |
| Disciplina: | 621.044 |
| Soggetto topico: | Plasma engineering |
| Microelectronics - Materials - Effect of radiation on | |
| Surfaces (Technology) | |
| Soggetto genere / forma: | Electronic books. |
| Note generali: | Bibliographic Level Mode of Issuance: Monograph |
| Titolo autorizzato: | Plasma processing of materials |
| ISBN: | 1-280-20336-6 |
| 9786610203369 | |
| 0-309-58375-6 | |
| 0-585-08463-7 | |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910456249303321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |