Plasma processing of materials [[electronic resource] ] : scientific opportunities and technological challenges / / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council

• Record Nr.: UNINA9910456249303321
• Pubbl/distr/stampa: Washington, D.C., : National Academy Press, 1991
• ISBN: 1-280-20336-6; 9786610203369; 0-309-58375-6; 0-585-08463-7
• Descrizione fisica: 1 online resource (87 p.)
• Disciplina: 621.044
• Soggetti: Plasma engineering; Microelectronics - Materials - Effect of radiation on; Surfaces (Technology); Electronic books.
• Lingua di pubblicazione: Inglese
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Note generali: Bibliographic Level Mode of Issuance: Monograph