01911nam 2200565 a 450 991045624930332120200520144314.01-280-20336-697866102033690-309-58375-60-585-08463-7(CKB)110986584751116(OCoLC)43475627(CaPaEBR)ebrary10055392(SSID)ssj0000222460(PQKBManifestationID)11175776(PQKBTitleCode)TC0000222460(PQKBWorkID)10169814(PQKB)11765997(MiAaPQ)EBC3376299(Au-PeEL)EBL3376299(CaPaEBR)ebr10055392(OCoLC)923262698(EXLCZ)9911098658475111619911004d1991 uy 0engurcn|||||||||txtccrPlasma processing of materials[electronic resource] scientific opportunities and technological challenges /Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research CouncilWashington, D.C. National Academy Press19911 online resource (87 p.) Bibliographic Level Mode of Issuance: Monograph0-309-04597-5 Plasma engineeringMicroelectronicsMaterialsEffect of radiation onSurfaces (Technology)Electronic books.Plasma engineering.MicroelectronicsMaterialsEffect of radiation on.Surfaces (Technology)621.044MiAaPQMiAaPQMiAaPQBOOK9910456249303321Plasma processing of materials1982096UNINA