Reliability of MEMS / / edited by Osamu Tabata and Toshiyuki Tsuchiya
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| Titolo: |
Reliability of MEMS / / edited by Osamu Tabata and Toshiyuki Tsuchiya
|
| Pubblicazione: | Weinheim, : Wiley-VCH, c2008 |
| Edizione: | 11th ed. |
| Descrizione fisica: | 1 online resource (0 p.) |
| Disciplina: | 615.7 |
| Soggetto topico: | Microelectromechanical systems - Reliability |
| Electrical engineering | |
| Altri autori: |
TsuchiyaToshiyuki
TabataOsamu <1956->
|
| Note generali: | "Testing of materials and devices". |
| Nota di bibliografia: | Includes bibliographical references and index. |
| Sommario/riassunto: | This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS. |
| Titolo autorizzato: | Reliability of MEMS |
| ISBN: | 1-281-94693-1 |
| 9786611946937 | |
| 3-527-62213-6 | |
| 3-527-62256-X | |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9911018835503321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |
Serie:
Advanced micro & nanosystems ; ; v.6.