LEADER 02423nam 2200589Ia 450 001 9911018835503321 005 20251116153533.0 010 $a1-281-94693-1 010 $a9786611946937 010 $a3-527-62213-6 010 $a3-527-62256-X 035 $a(CKB)1000000000551372 035 $a(EBL)3460105 035 $a(SSID)ssj0000235367 035 $a(PQKBManifestationID)11176146 035 $a(PQKBTitleCode)TC0000235367 035 $a(PQKBWorkID)10260862 035 $a(PQKB)11121884 035 $a(MiAaPQ)EBC3460105 035 $a(OCoLC)264717029 035 $a(BIP)13696729 035 $a(EXLCZ)991000000000551372 100 $a20080822d2008 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aReliability of MEMS /$fedited by Osamu Tabata and Toshiyuki Tsuchiya 205 $a11th ed. 210 $aWeinheim $cWiley-VCH$dc2008 215 $a1 online resource (0 p.) 225 1 $aAdvanced micro & nanosystems ;$vv.6 300 $a"Testing of materials and devices". 311 08$a3-527-31494-6 320 $aIncludes bibliographical references and index. 330 $aThis first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS. 410 0$aAdvanced micro & nanosystems ;$vv.6. 606 $aMicroelectromechanical systems$xReliability 606 $aElectrical engineering 615 0$aMicroelectromechanical systems$xReliability. 615 0$aElectrical engineering. 676 $a615.7 701 $aTsuchiya$b Toshiyuki$01667640 701 $aTabata$b Osamu$f1956-$0892953 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9911018835503321 996 $aReliability of MEMS$94027600 997 $aUNINA