02423nam 2200589Ia 450 991101883550332120251116153533.01-281-94693-197866119469373-527-62213-63-527-62256-X(CKB)1000000000551372(EBL)3460105(SSID)ssj0000235367(PQKBManifestationID)11176146(PQKBTitleCode)TC0000235367(PQKBWorkID)10260862(PQKB)11121884(MiAaPQ)EBC3460105(OCoLC)264717029(BIP)13696729(EXLCZ)99100000000055137220080822d2008 uy 0engur|n|---|||||txtccrReliability of MEMS /edited by Osamu Tabata and Toshiyuki Tsuchiya11th ed.Weinheim Wiley-VCHc20081 online resource (0 p.)Advanced micro & nanosystems ;v.6"Testing of materials and devices".3-527-31494-6 Includes bibliographical references and index.This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.Advanced micro & nanosystems ;v.6.Microelectromechanical systemsReliabilityElectrical engineeringMicroelectromechanical systemsReliability.Electrical engineering.615.7Tsuchiya Toshiyuki1667640Tabata Osamu1956-892953MiAaPQMiAaPQMiAaPQBOOK9911018835503321Reliability of MEMS4027600UNINA