Beam technologies for integrated processing [[electronic resource] ] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council
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| Titolo: |
Beam technologies for integrated processing [[electronic resource] ] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council
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| Pubblicazione: | Washington, D.C., : National Academy Press, 1992 |
| Descrizione fisica: | 1 online resource (101 p.) |
| Disciplina: | 621.381 |
| Soggetto topico: | Microelectronics industry |
| Molecular beams - Industrial applications | |
| Microelectronics - Materials | |
| Plasma-enhanced chemical vapor deposition - Industrial applications | |
| Note generali: | "NMAB-461." |
| Nota di bibliografia: | Includes bibliographical references. |
| Titolo autorizzato: | Beam technologies for integrated processing |
| ISBN: | 1-280-21147-4 |
| 9786610211470 | |
| 0-309-58395-0 | |
| 0-585-14945-3 | |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910778508703321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |