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200 10$aBeam technologies for integrated processing$b[electronic resource] $ereport of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council
210   $aWashington, D.C. $cNational Academy Press$d1992
215   $a1 online resource (101 p.) 
300   $a"NMAB-461."
311   $a0-309-04635-1 
320   $aIncludes bibliographical references.
606   $aMicroelectronics industry
606   $aMolecular beams$xIndustrial applications
606   $aMicroelectronics$xMaterials
606   $aPlasma-enhanced chemical vapor deposition$xIndustrial applications
615  0$aMicroelectronics industry.
615  0$aMolecular beams$xIndustrial applications.
615  0$aMicroelectronics$xMaterials.
615  0$aPlasma-enhanced chemical vapor deposition$xIndustrial applications.
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