|
|
|
|
|
|
|
|
1. |
Record Nr. |
UNINA9910778508703321 |
|
|
Titolo |
Beam technologies for integrated processing [[electronic resource] ] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
|
|
|
|
|
|
|
Pubbl/distr/stampa |
|
|
Washington, D.C., : National Academy Press, 1992 |
|
|
|
|
|
|
|
ISBN |
|
1-280-21147-4 |
9786610211470 |
0-309-58395-0 |
0-585-14945-3 |
|
|
|
|
|
|
|
|
Descrizione fisica |
|
1 online resource (101 p.) |
|
|
|
|
|
|
Disciplina |
|
|
|
|
|
|
Soggetti |
|
Microelectronics industry |
Molecular beams - Industrial applications |
Microelectronics - Materials |
Plasma-enhanced chemical vapor deposition - Industrial applications |
|
|
|
|
|
|
|
|
Lingua di pubblicazione |
|
|
|
|
|
|
Formato |
Materiale a stampa |
|
|
|
|
|
Livello bibliografico |
Monografia |
|
|
|
|
|
Note generali |
|
|
|
|
|
|
Nota di bibliografia |
|
Includes bibliographical references. |
|
|
|
|
|