Journal of vacuum science and technology . B Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B
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| Titolo: |
Journal of vacuum science and technology . B Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B
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| Pubblicazione: | New York, NY, : AVS through the American Institute of Physics |
| Disciplina: | 621 |
| Soggetto topico: | Nanotechnology |
| Microelectronics | |
| Soggetto genere / forma: | Periodicals. |
| ISSN: | 2166-2754 |
| Note generali: | Refereed/Peer-reviewed |
| Titolo abbreviato (Periodici): | J VAC SCI TECHNOL B NANOTECHNOL MICROELECTRON |
| J. vac. sci. technol., B, Nanotechnol. microelectron | |
| Altri titoli varianti: | Nanotechnology & microelectronics |
| Nanotechnology and microelectronics | |
| Journal of vacuum science and technology. processing, measurement, & phenomena | |
| JVST B | |
| Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | |
| Titolo autorizzato: | Journal of vacuum science and technology |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Periodico |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910139689103321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |