02072nas 2200565-a 450 991013968910332120200718073054.12166-2754(OCoLC)779189954(CKB)2550000000090501(CONSER)--2012200198(EXLCZ)99255000000009050120120305a20109999 --- aengur|||||||||||txtrdacontentcrdamediacrrdacarrierJournal of vacuum science and technologyBNanotechnology & microelectronics materials, processing, measurement, & phenomena : JVST BNew York, NY AVS through the American Institute of PhysicsRefereed/Peer-reviewed2166-2746 Nanotechnology & microelectronicsNanotechnology and microelectronicsJournal of vacuum science and technology.processing, measurement, & phenomenaJVST BJournal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and PhenomenaJ VAC SCI TECHNOL B NANOTECHNOL MICROELECTRONJ. vac. sci. technol., B, Nanotechnol. microelectron.NanotechnologyPeriodicalsMicroelectronicsPeriodicalsMicroelectronicsfast(OCoLC)fst01019757Nanotechnologyfast(OCoLC)fst01032639NanotechnologyPeriodicalsnliMicroelectronicsPeriodicalsnliPeriodicals.fastPeriodicals.lcgftNanotechnologyMicroelectronicsMicroelectronics.Nanotechnology.NanotechnologyMicroelectronics621American Vacuum Society.American Institute of Physics.JOURNAL9910139689103321Journal of vacuum science and technology2428284UNINA