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101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
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200 00$aJournal of vacuum science and technology$hB$iNanotechnology & microelectronics $ematerials, processing, measurement, & phenomena : JVST B
210   $aNew York, NY $cAVS through the American Institute of Physics
300   $aRefereed/Peer-reviewed
311   $a2166-2746 
517 1 $aNanotechnology & microelectronics
517 1 $aNanotechnology and microelectronics
517 1 $aJournal of vacuum science and technology.$eprocessing, measurement, & phenomena
517 1 $aJVST B
517 1 $aJournal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
531   $aJ VAC SCI TECHNOL B NANOTECHNOL MICROELECTRON
531 0 $aJ. vac. sci. technol., B, Nanotechnol. microelectron.
606   $aNanotechnology$vPeriodicals
606   $aMicroelectronics$vPeriodicals
606   $aMicroelectronics$2fast$3(OCoLC)fst01019757
606   $aNanotechnology$2fast$3(OCoLC)fst01032639
606   $aNanotechnology$vPeriodicals$2nli
606   $aMicroelectronics$vPeriodicals$2nli
608   $aPeriodicals.$2fast
608   $aPeriodicals.$2lcgft
615  0$aNanotechnology
615  0$aMicroelectronics
615  7$aMicroelectronics.
615  7$aNanotechnology.
615  7$aNanotechnology
615  7$aMicroelectronics
676   $a621
712 02$aAmerican Vacuum Society.
712 02$aAmerican Institute of Physics.
906   $aJOURNAL
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996   $aJournal of vacuum science and technology$92428284
997   $aUNINA