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From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou



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Autore: Madou Marc J. Visualizza persona
Titolo: From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications / / by Marc J. Madou Visualizza cluster
Pubblicazione: Boca Raton, FL : , : CRC Press, an imprint of Taylor and Francis, , 2011
Edizione: Third edition.
Descrizione fisica: 1 online resource (642 p.)
Disciplina: 620.5
Soggetto topico: Microelectromechanical systems
Nanoelectromechanical systems
Microfluidics
Solid state physics
Note generali: Description based upon print version of record.
Nota di bibliografia: Includes bibliographical references at the end of each chapters.
Nota di contenuto: Front Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared; Chapter 2: Nature as an Engineering Guide: Biomimetics; Chapter 3: Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared; Chapter 4: Packaging, Assembly, and Self-Assembly; Chapter 5: Selected Materials and Processes for MEMS and NEMS; Chapter 6: Metrology and MEMS/NEMS Modeling; Chapter 7: Scaling Laws; Chapter 8: Actuators; Chapter 9: Power and Brains in Miniature Devices
Chapter 10: MEMS and NEMS ApplicationsBack Cover
Sommario/riassunto: From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms.
Titolo autorizzato: From MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications  Visualizza cluster
ISBN: 0-429-10921-0
1-4200-5518-6
1-4398-9524-4
Formato: Materiale a stampa
Livello bibliografico Monografia
Lingua di pubblicazione: Inglese
Record Nr.: 9910829016703321
Lo trovi qui: Univ. Federico II
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