2016 21st International Conference on Ion Implantation Technology (IIT) / / Institute of Electrical and Electronics Engineers
(Visualizza in formato marc)
(Visualizza in BIBFRAME)
| Titolo: |
2016 21st International Conference on Ion Implantation Technology (IIT) / / Institute of Electrical and Electronics Engineers
|
| Pubblicazione: | Piscataway, NJ : , : IEEE, , 2016 |
| ©2016 | |
| Descrizione fisica: | 1 online resource (87 pages) |
| Disciplina: | 621.38152 |
| Soggetto topico: | Ion implantation |
| Nota di bibliografia: | Includes bibliographical references and index. |
| Sommario/riassunto: | Annotation The conference will cover topics on ion implantation technology and thermal processing for semiconductor devices and materials including junction, contact, material modification, process modeling and metrology methods. |
| Altri titoli varianti: | 2016 21st International Conference on Ion Implantation Technology |
| Titolo autorizzato: | 2016 21st International Conference on Ion Implantation Technology (IIT) |
| ISBN: | 1-5090-2024-1 |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | 9910172650803321 |
| Lo trovi qui: | Univ. Federico II |
| Opac: | Controlla la disponibilità qui |