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100   $a20230418d2016      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$a2016 21st International Conference on Ion Implantation Technology (IIT) /$fInstitute of Electrical and Electronics Engineers
210  1$aPiscataway, NJ :$cIEEE,$d2016.
210  4$dİ2016
215   $a1 online resource (87 pages)
311   $a1-5090-2025-X 
320   $aIncludes bibliographical references and index.
330   $aAnnotation The conference will cover topics on ion implantation technology and thermal processing for semiconductor devices and materials including junction, contact, material modification, process modeling and metrology methods.
517   $a2016 21st International Conference on Ion Implantation Technology 
606   $aIon implantation$vCongresses
615  0$aIon implantation
676   $a621.38152
801  0$bNjHacI
801  1$bNjHacl
906   $aPROCEEDING
912   $a9910172650803321
996   $a2016 21st International Conference on Ion Implantation Technology (IIT)$92541618
997   $aUNINA