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Record Nr. |
UNINA9910172650803321 |
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Titolo |
2016 21st International Conference on Ion Implantation Technology (IIT) / / Institute of Electrical and Electronics Engineers |
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Pubbl/distr/stampa |
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Piscataway, NJ : , : IEEE, , 2016 |
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©2016 |
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ISBN |
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Descrizione fisica |
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1 online resource (87 pages) |
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Disciplina |
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Soggetti |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Nota di bibliografia |
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Includes bibliographical references and index. |
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Sommario/riassunto |
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Annotation The conference will cover topics on ion implantation technology and thermal processing for semiconductor devices and materials including junction, contact, material modification, process modeling and metrology methods. |
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