Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets : Doctoral Thesis accepted by The Complutense University of Madrid, Spain / María Ángela Pampillón Arce
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| Autore: |
Pampillón Arce, María Á.
|
| Titolo: |
Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets : Doctoral Thesis accepted by The Complutense University of Madrid, Spain / María Ángela Pampillón Arce
|
| Pubblicazione: | Cham, : Springer, 2017 |
| Titolo uniforme: | Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets |
| Descrizione fisica: | xxiii, 164 p. : ill. ; 24 cm |
| Soggetto topico: | 00A79 (77-XX) - Physics [MSC 2020] |
| 74K35 - Thin films [MSC 2020] | |
| 74A50 - Structured surfaces and interfaces, coexistent phases [MSC 2020] | |
| Soggetto non controllato: | Gadolinium Oxide |
| Gadolinium Scandate | |
| High Permittivity Dielectrics | |
| High Pressure Sputtering | |
| InP Substrates | |
| MIS Devices | |
| MOSFET | |
| Plasma Oxidation | |
| Scandium Oxide | |
| Scavenging Effect | |
| Titolo autorizzato: | Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets |
| Formato: | Materiale a stampa  |
| Livello bibliografico | Monografia |
| Lingua di pubblicazione: | Inglese |
| Record Nr.: | VAN0187568 |
| Lo trovi qui: | Univ. Vanvitelli |
| Localizzazioni e accesso elettronico | http://doi.org/10.1007/978-3-319-66607-5 |
| Opac: | Controlla la disponibilità qui |
Serie:
Springer theses : recognizing outstanding Ph.D. research Berlin . -Springer , 2010-